Understanding MEMS Substrates: The Core of MEMS Systems (Computers - Hardware)

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Understanding MEMS Substrates: The Core of MEMS Systems


MEMS substrates go about as the foundation where little size sensors, actuators, and various parts are manufactured. These substrates are consistently created utilizing materials like silicon, glass, or polymers, offering various properties fitting for different MEMS applications. Silicon substrates, for instance, are by and large used in view of their fabulous mechanical properties, comparability with microfabrication processes, and spread out structure in the semiconductor business.

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Last Update : Dec 28, 2024 9:44 AM
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Item  Owner  : Shawn Wang
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